Spin Coating Systems

6800 Spin Coater Series

The SCS 6800 Spin Coater Series offers researchers efficiency and accuracy they can rely on.

Product Information

The SCS 6800 Spin Coater Series enables R&D and university laboratories around the world to efficiently and accurately develop and refine coating applications. Available in non-programmable and programmable models, the SCS 6800 features proprietary circuitry and user-friendly operation that allow for the uniform application of photoresists, polyimides, metal-organics, dopants, silica films and most organic and aqueous solutions to planar substrates.

System Features

  • Precise control of spin speed and acceleration/deceleration rates
  • Easy-to-use keypad and LCD display on the front panel
  • Clear cover features a dispensing slot and safety interlock
  • Non-programmable model (8-inch) can store and execute a single recipe with up to four steps
  • Programmable models (8- and 12-inch) can store and execute up to three recipes with eight steps each

Optional Features

Nonprogrammable

  • External vacuum pump

Programmable

  • External vacuum pump
  • Software for external programming and unlimited recipe storage
  • Foot pedal
  • SCS Multi-Dispense automated dispense system

SCS offers several chucks for use in our SCS Spin Coaters. Our chucks are machined to close tolerances and provide an exceptionally flat, rigid surface for mounting substrates of different sizes, weights, and shapes. SCS can also provide custom chucks depending on your application.

Vacuum chucks are available in stainless steel, hard anodized aluminum, or DELRIN®. Be sure to specify the material of choice and chuck size when ordering.

Type CS : Flat Surface Cross and Scroll
Used to hold a thin, planar substrate such as silicon, glass or germanium on a spinning shaft for maximum rotational speed. Has cross and scroll design.

Type H: O-Ring Vacuum-Holding
Used to hold relative heavy substrates, such as glass, quartz, ceramic and metal. Features O-ring vacuum seal.

Type L: O-Ring Vacuum-Holding
With Mechanical Locating Fingers Designed for heavy, large or unsymmetrical substrates. Guide fingers assist in positioning and holding substrates. Also includes an O-ring vacuum seal.

Type Pedestal: Non-Vacuum
Custom manufactured to precise user-specified dimensions. Designed for double coating applications (substrates do not touch bottom of chuck).

Specifications

Bowl Size - Nonprogrammable 8 in / 20.3 cm
Bowl Size - Programmable 8 in. and 12 in. / 20.3 and 30.5
Rotational Speed 0 to 9,999 RPM in 1 RPM increments
Acceleration/Deceleration 0.1 to 30 seconds in 0.1 second increments
Dwell Time 0 to 999 seconds in 1 second increments
Dispense Time 10 to 30 seconds in 0.1 second increments (programmable model only)
Power 110/240 VAC, 50/60Hz, 1Ø
Dimensions (W x D x H) 13.25 x 18 x 10.8 in / 33.7 x 45.7 x 27.4 cm

6800 Spin Coater Series

The SCS 6800 Spin Coater Series enables R&D and university laboratories to efficiently and accurately develop and refine coating applications.