SCS offers several chucks for use in our SCS Spin Coaters. Our chucks are machined to close tolerances and provide an exceptionally flat, rigid surface for mounting substrates of different sizes, weights, and shapes. SCS can also provide custom chucks depending on your application.
Vacuum chucks are available in stainless steel, hard anodized aluminum, or DELRIN®. Be sure to specify the material of choice and chuck size when ordering.
Type CS : Flat Surface Cross and Scroll
Used to hold a thin, planar substrate such as silicon, glass or germanium on a spinning shaft for maximum rotational speed. Has cross and scroll design.
Type H: O-Ring Vacuum-Holding
Used to hold relative heavy substrates, such as glass, quartz, ceramic and metal. Features O-ring vacuum seal.
Type L: O-Ring Vacuum-Holding
with Mechanical Locating Fingers Designed for heavy, large or unsymmetrical substrates. Guide fingers assist in positioning and holding substrates. Also includes an O-ring vacuum seal.
Type Pedestal: Non-Vacuum
Custom manufactured to precise user-specified dimensions. Designed for double coating applications (substrates do not touch bottom of chuck).