SCS Equipment


SCS Spin Coater Chucks

Manufactured to the same exacting standards as our SCS Spin Coaters, our spin coater chucks provide an ideal platform for your application. They’re available in different configurations and materials. Custom chucks from SCS are available as well.

Product Information


SCS offers several chucks for use in our SCS Spin Coaters. Our chucks are machined to close tolerances and provide an exceptionally flat, rigid surface for mounting substrates of different sizes, weights, and shapes. SCS can also provide custom chucks depending on your application.

Vacuum chucks are available in stainless steel, hard anodized aluminum, or DELRIN®. Be sure to specify the material of choice and chuck size when ordering.


SCS offers different chuck configuration for a range of application needs. All are manufactured to SCS quality standards.

Type CS : Flat Surface Cross and Scroll

Used to hold a thin, planar substrate such as silicon, glass or germanium on a spinning shaft for maximum rotational speed. Has cross and scroll design.

Type H: O-Ring Vacuum-Holding

Used to hold relative heavy substrates, such as glass, quartz, ceramic and metal. Features O-ring vacuum seal.

Type L: O-Ring Vacuum-Holding

with Mechanical Locating Fingers Designed for heavy, large or unsymmetrical substrates. Guide fingers assist in positioning and holding substrates. Also includes an O-ring vacuum seal.

Type Pedestal: Non-Vacuum

Custom manufactured to precise user-specified dimensions. Designed for double coating applications (substrates do not touch bottom of chuck).


Bowl Size - Nonprogrammable 8 in / 20.3 cm
Bowl Size - Programmable 8 in. and 12 in. / 20.3 and 30.5
Rotational Speed 0 to 9,999 RPM in 1 RPM increments
Acceleration/Deceleration 0.1 to 30 seconds in 0.1 second increments
Dwell Time 0 to 999 seconds in 1 second increments
Dispense Time 10 to 30 seconds in 0.1 second increments (programmable model only)
Power 120 / 240 VAC, 50 / 60 Hz,1Ø
Power Input 115/230 VAC, 50/60 Hz, 1Ø
Dimensions (W x D x H) 13.25 x 18 x 10.8 in / 33.7 x 45.7 x 27.4 cm