 |
Spin Coater Chuck Selection
SCS chucks are machined to close tolerances and provide an exceptionally
flat, rigid surface for mounting substrates of different sizes, weights, and
shapes. Custom chucks are also available.
Proper chuck selection should be based upon substrate size and
rigidity. The proper chuck diameter is 1/4 to 1 inch smaller than the substrate
diameter. The entire substrate should be supported if it is flexible, fragile,
or when it is to be wiped or brushed during cleaning. Vacuum chucks are available
in stainless steel, hard anodized aluminum, or DELRIN®. Please specify the
material of choice and chuck size when ordering.
 |
|
Type CS Chuck
Used to hold a thin, planar surfaced substrate such as silicon, glass, or
germanium on a spinning shaft for higher or maximum RPMs. |
 |
Type H Chuck
Used to hold relatively heavy substrates such as glass, quartz, ceramic,
metal, etc. |
 |
Type L Chuck
Used to hold heavy, large or unsymmetrical substrates. The guide fingers
assist in proper positioning and holding of the substrate. |
 |
Type R Chuck
Used to hold square or rectangular substrates. Design achieves a uniform
coating across the entire substrate. Custom milled recess holds substrate. |
|
|